International Research Journal of Engineering and Technology (IRJET)
e-ISSN: 2395 -0056
Volume: 04 Issue: 02 | Feb -2017
p-ISSN: 2395-0072
www.irjet.net
Recent Application and Future Development Scope in MEMS Mr. U. G. Phonde1, Mr. H. S. Daingade2, Mr. V. A. Patil3, Mrs. S. S. halunde4 1Assistant
Professor, E&TC Engineering, ADCET, Ashta, Maharashtra, India Professor, E&TC Engineering, ADCET, Ashta, Maharashtra, India 3Assistant Professor, E&TC Engineering, ADCET, Ashta, Maharashtra, India 4Assistant Professor, E&TC Engineering, SITCOE, Yadrav, Maharashtra, India ---------------------------------------------------------------------***--------------------------------------------------------------------2Assistant
Abstract - This paper deals with recent developments and future of micro-electromechanical systems, or MEMS. Micro-Electro-Mechanical Systems (MEMS) are extensively used in the field of scientific and engineering. MEMS encompass the process-based technologies used to fabricate tiny integrated devices and/or systems that integrate functionalities from different physical domains into one device Micro-Electro-Mechanical Systems. Such devices are fabricated using a wide range of technologies, having in common the ability to create structures with micro- and even nanometer accuracies. Micro-electromechanical systems (MEMS) are a process technology used to create tiny integrated devices or systems that combine mechanical and electrical components. They are fabricated using integrated circuit (IC) batch processing techniques and can range in size from a few micrometers to millimeters.
structures having no moving elements, to extremely complex electromechanical systems with multiple moving elements under the control
of integrated microelectronics. The one main criterion of MEMS is that there are at least some elements having some sort of mechanical functionality whether or not these elements can move. The term used to define MEMS varies in different parts of the world. In the United States they are predominantly called MEMS, while in some other parts of the world they are called “Microsystems Technology” or “micro machined devices”. These devices (or systems) have the ability to sense, control and actuate on the micro scale, and generate effects on the macro scale.
Key Words: MEMS, MST, GPS,MOEMS, PDMS etc.
1. INTRODUCTION This document is template. We ask that authors follow some MEMS, an acronym that originated in the United States, are also referred to as Micro System Technology (MST) in Europe and Micromachining in Japan. Regardless of terminology, the uniting factor of a MEMS device is in the way it is made. While the device electronics are fabricated using `computer chip' IC technology, the micromechanical components are fabricated by sophisticated manipulations of silicon and other substrates using micromachining processes.
Fig.1: Components of MEMS
1.1 Recent development:
MEMS, is a technology that in its most general form can be defined as miniaturized mechanical and electro-mechanical elements (i.e., devices and structures) that are made using the techniques of micro fabrication. The critical physical dimensions of MEMS devices can vary from well below one micron on the lower end of the dimensional spectrum, all the way to several millimeters. Likewise, the types of MEMS devices can vary from relatively simple © 2017, IRJET
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The experience gained from these early MEMS applications has resulted in an enabling technology for new biomedical applications (e.g. Lab on Chip) and optical or wireless communications, also referred to as respectively Micro Opto Electro Mechanical Systems (MOEMS), and Radio Frequency MEMS (RF MEMS).
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