MICROLAB OPEN ACCESS CLEANROOM FOR GLASS & SILICON ETCHING OF MICROSTRUCTURED DEVICES CLEANROOM
• All technology available for entire process flows, incl. patterning, etching, bonding and dicing. • Wafer size of 100 mm. • Feature size < 1 μm. • Foster multidisciplinary research. • Intensify cooperation with industry. • Focus on microfluidic solutions for medical, pharma and biotech applications.
CONTACT MICROLAB Vrije Universiteit Brussel Pleinlaan 2 - 1050 Brussels Prof. Dr. Ir. Wim De Malsche, Scientific Director wim.de.malsche@vub.be Ir. Filip Legein Operational Manager filip.legein@vub.be
CORE FACILITY