Published On : 19 Nov 2025
• Cluster Tools Market size was valued at US$ 4.73 billion in 2024 and is projected to reach US$ 8.94 billion by 2032, at a CAGR of 9.5% during the forecast period 20252032
Report Studies
• The global Cluster Tools Market size was valued at US$ 4.73 billion in 2024 and is projected to reach US$ 8.94 billion by 2032, at a CAGR of 9.5% during the forecast period 2025-2032.
• Cluster tools are advanced semiconductor manufacturing systems designed for multi-step wafer processing in a controlled environment. These systems integrate multiple process chambers connected through a central transfer module with robotic automation, enabling sequential deposition, etching, or cleaning steps without breaking vacuum. The two primary configurations include vacuum cluster tools (dominant in semiconductor fabrication) and nonvacuum cluster tools (used in atmospheric pressure applications).
By Type:
• Vacuum Cluster Tools
• Subtypes: Single wafer processing, multi-wafer processing
• Non-Vacuum Cluster Tools
• Subtypes: Atmospheric pressure systems, controlled environment systems
• Hybrid Cluster Tools
• Others
By Application: • Physical Vapor Deposition (PVD)
Chemical Vapor Deposition (CVD)
Etching
R&D and Pilot Production
Others
By Process: • Single Process Tools • Multi-process Integration Tools • Subtypes: Sequential processing, parallel processing • Others
By End User:
• Semiconductor Foundries
• IDMs (Integrated Device Manufacturers)
• Research Institutes
• Others
Key Players :
• Lam Research (U.S.)
• Tokyo Electron Limited (TEL) (Japan)
• Evatec (Switzerland)
• Naura (China)
• Oxford Instruments (UK)
• Ebara (Japan)
Picosun (Finland)
KLA Corporation (U.S.)
Ulvac (Japan)
Syskey Technology (China)
SPTS Technologies Ltd. (UK)
Kurt J. Lesker (U.S.)
